高等学校化学学报 ›› 2003, Vol. 24 ›› Issue (11): 1962.

• 论文 • 上一篇    下一篇

聚甲基丙烯酸甲酯微流控分析芯片的简易热压制作法

杜晓光, 关艳霞, 王福仁, 方肇伦   

  1. 东北大学理学院分析科学研究中心, 沈阳 110004
  • 收稿日期:2002-11-20 出版日期:2003-11-24 发布日期:2003-11-24
  • 通讯作者: 方肇伦(1934年出生),男,教授,博士生导师,中国科学院院士,主要从事微流控分析、流动注射分析和光谱分析的研究.E-mail:fangzl@mail.sy.ln.cn E-mail:fangzl@mail.sy.ln.cn
  • 基金资助:

    国家自然科学基金重大项目(批准号:20299030)资助

Fabrication of Poly(methyl methacrylate)(PMMA) Microfluidic Chips by a Simple Hot Embossing Method

DU Xiao-Guang, GUAN Yan-Xia, WANG Fu-Ren, FANG Zhao-Lun   

  1. Research Center for Analytical Sciences, Box 332, Northeastern University, Shenyang 110004, China
  • Received:2002-11-20 Online:2003-11-24 Published:2003-11-24

摘要: 提出聚甲基丙烯酸甲酯(PMMA)微流控分析芯片的一种简易热压制作法,研究了镍基、单晶硅和玻璃3种阳模制备芯片及芯片的封合条件.采用扫描电镜(SEM)和电荷耦合检测器(CCD)对PMMA芯片的微通道及其横截面形貌进行了表征.SEM图和CCD图表明实现了热压封接.测定了PMMA芯片的伏安曲线和电渗流,其电渗流值与文献报道值基本一致.本法制作的PMMA芯片用于电泳分离Cy5荧光染料,峰高RSD为2.2%(n=11),理论塔板数7.4×104m-1.

关键词: 微流控芯片, 简易热压法, 聚甲基丙烯酸甲酯, 形貌表征, 电泳分离

Abstract: Acheap commercial pellet press was modified to perform hot embossing for the fabrication of PMMA microfluidic chips, after installing the devices for temperature control and water cooling.Nickel electroplated master molds or microfabricated silicon and glass master molds were mounted on the embossing machine together with PMMA substrates and heated from 128℃ to 135℃, and pressed in the pressure range from 1.0-1.2 MPa for 30-60 s.After the assembly was cooled to near room temperature, the chip substrate with imprinted microchannels was removed.The complete process took about 15min.The substrate and its PMMA cover plate were bonded at 88-95 ℃ with 0.8-1.4 MPa pressure for 10-15 min.CCD images of microchannels and SEM images of open channels on the substrates and the cross section of chips are given to show the effectiveness of the procedure.The electroosmotic flow and voltage-ampere curves of the PMMA chips corresponded to those reported in the literature.The performance of the PMMAchipSIs demonstrated in the electrophoretic separation of Cy5 from byproducts with a precision of 2.2% RSD(n=11) and an efficiency of 7.4×104plates/m.

Key words: Microfluidic chips, Simple hot embossing, PMMA, Electrophoretic separation

中图分类号: 

TrendMD: