高等学校化学学报 ›› 2013, Vol. 34 ›› Issue (3): 532.doi: 10.7503/cjcu20120647

• 研究论文: 无机化学 • 上一篇    下一篇

溶胶-凝胶法在聚酰亚胺衬底上制备c轴取向ZnO薄膜

蒋里锋, 冯魏良, 黄培   

  1. 南京工业大学化学化工学院, 材料化学工程国家重点实验室, 南京 210009
  • 收稿日期:2012-07-06 出版日期:2013-03-10 发布日期:2013-02-18
  • 通讯作者: 黄培,男,博士,教授,博士生导师,主要从事功能高分子材料研究.E-mail:phuang@njut.edu.cn E-mail:phuang@njut.edu.cn

Sol-gel Preparation of c-Axis Oriented ZnO Thin Films on Polyimide Substrate

JIANG Li-Feng, FENG Wei-Liang, HUANG Pei   

  1. College of Chemistry and Chemical Engineering, State Key Laboratory of Materials-Oriented Chemical Engineering, Nanjing University of Technology, Nanjing 210009, China
  • Received:2012-07-06 Online:2013-03-10 Published:2013-02-18

摘要:

通过溶胶-凝胶工艺, 采用两步加热法在聚酰亚胺表面制备了具有c轴取向的ZnO薄膜. 通过差式扫描量热-热重分析(DSC-TGA)得出最佳的前热处理温度和后热处理温度分别为300和390 ℃. 通过X射线衍射(XRD)和扫描电子显微镜(SEM)对薄膜的晶体取向和表面形貌进行了分析, 描述了ZnO薄膜在聚酰亚胺上的生长过程. 拉伸实验结果表明, ZnO薄膜与聚酰亚胺衬底有较强的附着力.

关键词: ZnO薄膜, 溶胶-凝胶法, 聚酰亚胺, 柔性衬底

Abstract:

c-Axis oriented ZnO thin films were prepared by sol-gel method using two-steps heating method on polyimide(PI) substrate. Differential scanning calorimetry-thermogravimetric analysis(DSC-TGA) results show that optimal ZnO thin film could be obtained after the sol was preheated at 300 ℃ and postheated at 390 ℃. c-Axis orientation and morphologies of the thin films were characterized by X-ray diffraction(XRD) and scanning electron microscopy(SEM). The stages of ZnO growth on the PI substrate were described in detail. Moreover, the result of the tensile test suggests that the ZnO films have good adhesion to the polyimide substrate.

Key words: ZnO thin film, Sol-gel method, Polyimide, Flexible substrate

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