Chem. J. Chinese Universities ›› 2002, Vol. 23 ›› Issue (9): 1648.

• Articles • Previous Articles     Next Articles

Influence of Methanol Addition on Diamond Films Deposition with Hot Cathode DC-PCVD Method

JIANG Zhi-Gang, JIN Zeng-Sun, BAI YI-Zhen, CAO Pei-Jiang, ZHANG Lu, YANG Guang-Liang, LI Jun-Jie, LÜ Xian-Yi   

  1. National Laboratory of Super Hard Materials, Jilin University, Changchun 130023, China
  • Received:2001-12-12 Online:2002-09-24 Published:2002-09-24

Abstract: Diamond films were deposited with hot cathode DC-PCVDmethod in this paper. The methanol addition influences on discharge state and diamond film growth characteristics were studied. The research results show that a proper amount of methanol addition is beneficial to the stability of glow discharge. It can keep the cathode surface clean and improve the film quality. The growth characteristics of diamond films are analyzed by means of SEMand Raman spectroscopy.

Key words: Hot cathode PCVD, Methanol, Glow discharge, Growth characteristics of diamond films

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