Sol-gel Preparation of c-Axis Oriented ZnO Thin Films on Polyimide Substrate

doi:10.7503/cjcu20120647

Abstract

Abstract:

c-Axis oriented ZnO thin films were prepared by sol-gel method using two-steps heating method on polyimide(PI) substrate. Differential scanning calorimetry-thermogravimetric analysis(DSC-TGA) results show that optimal ZnO thin film could be obtained after the sol was preheated at 300 ℃ and postheated at 390 ℃. c-Axis orientation and morphologies of the thin films were characterized by X-ray diffraction(XRD) and scanning electron microscopy(SEM). The stages of ZnO growth on the PI substrate were described in detail. Moreover, the result of the tensile test suggests that the ZnO films have good adhesion to the polyimide substrate.

Key words: ZnO thin film, Sol-gel method, Polyimide, Flexible substrate

CLC Number:

O611
O782.1

TrendMD:

JIANG Li-Feng, FENG Wei-Liang, HUANG Pei. Sol-gel Preparation of c-Axis Oriented ZnO Thin Films on Polyimide Substrate[J]. Chem. J. Chinese Universities, 2013, 34(3): 532.

References

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