高等学校化学学报 ›› 2003, Vol. 24 ›› Issue (7): 1180.

• 论文 • 上一篇    下一篇

微流控芯片中超微电极的制作及其在芯片-电化学检测中的应用

金亚, 罗国安   

  1. 清华大学化学系, 北京 100084
  • 收稿日期:2002-07-03 出版日期:2003-07-24 发布日期:2003-07-24
  • 通讯作者: 罗国安(1946年出生),男,教授,博士生导师,从事玻璃微流控芯片设计与制作研究.E-mail:galuo@chem.tsinghua.edu.cn E-mail:galuo@chem.tsinghua.edu.cn
  • 基金资助:

    国家自然科学基金重大项目(批准号:202993030)资助

Fabrication of the Microfluidic Chips with Integrated Ultra-micro Electrodes and Its Application in On-chip Electrochemical Detection

JIN Ya, LUO Guo-An   

  1. Department of Chemistry, Tsinghua University, Beijing 100084, China
  • Received:2002-07-03 Online:2003-07-24 Published:2003-07-24

摘要: 设计并制作了集成有超微电极的玻璃微流控芯片.在电化学检测芯片1(EC-1)中,以光刻方法制作13μm宽的Pt超微电极,距分离管道末端30μm,优化电极体系和分离电压,检测了电泳分离的神经递质.在电化学检测芯片2(EC-2)中,制作7μm宽的超微电极,在其上游集成城墙式的膜结构,进一步腐蚀后的膜厚度为10μm,具有良好的导电性和散热性能,成功地将高压电场截至在超微电极之前,具有进一步应用于电化学检测的能力.

关键词: 微流控芯片, 超微电极, 电化学检测, 多孔膜

Abstract: Microfluidic glass chips with integrated ultra-micro electrodes were fabricated. In pattern EC-1, a 13-μm-wide platinum electrode was located photolithographically at the end of separation channel and extended 30 μm into the 6 mm wide detection reservoir. The electrode system and separation voltage were optimized, and neurotransmitters were detected after electrophoretic separation. In pattern EC-2, a 7-μm-wide platinum electrode with a battlement-like membrane structure were integrated in the chips. With post-etching procedure, the membrane width was reduced to 10 μm. With good electric conductivity and heat dissipation capability, the porous membrane successfully shields the high electric field before the ultra-micro electrode, which shows great possibility to apply in the on-chip electrochemical detection.

Key words: Microfluidic chips, Ultra-micro electrode, Electrochemical detection, Porous membrane

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