高等学校化学学报

高等学校化学学报 ›› 1999, Vol. 20 ›› Issue (10): 1605.

• 论文 • 上一篇    下一篇

PET表面的碳氟等离子体处理改性层组分的变角XPS分析

张亮1, 毛坤元2, 张新生3, 王建祺4   

  1. 1. 新加坡国立大学化学系, 新加坡 119260;
    2. 美国尼高力仪器公司北京代表处, 北京 100020;
    3. 北京教育学院宣武分院, 北京 100050;
    4. 北京理工大学化工与材料学院, 北京 100081
  • 收稿日期:1998-11-23 出版日期:1999-10-24 发布日期:1999-10-24
  • 通讯作者: 张亮,男,35岁,博士.
  • 作者简介:张亮,男,35岁,博士.
  • 基金资助:

    国家教育委员会高等学校博士点专项基金

Analysis of the Compositions on PET Surface Layer Modified by Fluorocarbon Plasmas with Angle-dependent XPS Technique

ZHANG Liang1, MAO Kun-Yuan2, ZHANG Xin-Sheng3, WANG Jian-Qi4   

  1. 1. Department of chemistry, National University of singapoere, 10 Kent Ridge Crescent, Singapore 119260;
    2. Beijing Representative Office, Nicolet Insrtument Corporation, Beijin 100020;
    3. Beijing Education College at Xuanwu District, Beijing 100050, China;
    4. School of Chemical Engineering & Materials Science, Beijing Institute of Technology, Beijing 100081, China
  • Received:1998-11-23 Online:1999-10-24 Published:1999-10-24

PDF (PC)

被引次数

7

摘要： 采用CH4/CF4混合气体等离子体来处理PET表面.利用变角XPS研究改性后PET的表面改性层的组分随取样深度的变化.结果表明,碳氟混合气体等离子体在PET表面形成交联网络结构的改性层,改性层的化学组成随深度的变化不大;纯CF4等离子体的改性层的化学组成不均匀,含氟基团主要分布在外面.不同混合气体等离子体在PET表面形成改性层的结构决定于CH4的添加量.

关键词: CH4/CF4等离子体, PET, 变角XPS, 表面改性, 深度剖析

Abstract: The surface of PET was modified by fluorocarbon plasmas.Angle-dependent XPS technique was employed to study the surface structure and compositions of the modified layer on PET surface. It was found that the homogeneous, cross-linking modified layer on PET surface can be formed by CH4/CF4plasmas, and their composition change a bit with the increase of the sampling depth of XPS. However, for pure CF4plasma, the modified layer is heterogeneous, and the amount of the fluorine-containing groups on the outmost modified layers is more than that in the inner layer. The structures of the modified layer on the modified PETsurface depend on the molar amount of CH4The relationship between the compositions of the modified layers and the sampling depth will be discussed in details in this paper.

Key words: CH4/CF4plasmas, PET, Angle-dependent XPS, Surface modification, Depth analysis

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