高等学校化学学报

高等学校化学学报 ›› 2013, Vol. 34 ›› Issue (9): 2034.doi: 10.7503/cjcu20130612

• 研究快报 • 上一篇    下一篇

背入射Au/TiO2/Au肖特基结紫外探测器

刘国华1, 谷学汇1, 李海龙1, 郭文滨1, 张歆东2   

  1. 1. 吉林大学集成光电子国家重点实验室, 长春 130012;
    2. 电子科学与工程学院, 长春 130012
  • 收稿日期:2013-07-04 出版日期:2013-09-10 发布日期:2013-08-30
  • 作者简介:郭文滨,男,博士,副教授,主要从事光电子器件研究.E-mail:guowb@jlu.edu.cn张歆东,女,博士,教授,主要从事光电子器件物理研究.E-mail:xindong@jlu.edu.cn
  • 基金资助:

    国家自然科学基金(批准号:61006013)资助.

Back Incident Au/TiO2/Au Schottky Junction Ultraviolet Detector

LIU Guo-Hua1, GU Xue-Hui1, LI Hai-Long1, GUO Wen-Bin1, ZHANG Xin-Dong2   

  1. 1. State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012, China;
    2. College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • Received:2013-07-04 Online:2013-09-10 Published:2013-08-30

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关键词: 紫外探测器, TiO2纳米线阵列, 水热法, 肖特基结

Abstract:

Rutile phase TiO2 nanowire arrays were prepared on F:SnO2(FTO) substrate via a low temperature hydrothermal method and characterized by means of X-ray diffraction(XRD) and scanning electron microscopy(SEM). Then back incident ultraviolet photodetectors of Au/TiO2/Au structure were fabricated by traditional photo-lithography technique and magnetron sputter plating. At 2.0 V bias, a very low dark current of 3.5 nA is achieved due to the back-to-back structure of the device. Under the irradiation of 360 nm UV-light, the photocurrent can reach 704 nA. The maximum responsibility is up to 0.162 A/W at 360 nm, corresponding to a quantum efficiency of 56.2%.

Key words: Ultraviolet detector, TiO2 nanowire array, Hydrothermal method, Schottky junction

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