Well-aligned Carbon Nanotube Array Synthesized at Low Temperature by Microwave Plasma Enhanced Chemical Vapor Deposition

Chem. J. Chinese Universities ›› 2001, Vol. 22 ›› Issue (5): 731.

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Well-aligned Carbon Nanotube Array Synthesized at Low Temperature by Microwave Plasma Enhanced Chemical Vapor Deposition

CHEN Xin¹, HU Zheng¹, WANG Xi-Zhang¹, WU Qiang¹, CHEN Yi¹, YANG Shao-Guang², DU You-Wei²

1. Department of Chemistry, Laboratory of Mesoscopic Materials and Chemistry, National Laboratory of Solid State Microstructure, Nanjing University, Nanjing 210093, China;
2. Department of Physics, Nanjing University, Nanjing 210093, China

Received:2000-10-12 Online:2001-05-24 Published:2001-05-24

Abstract

Abstract: Well-aligned nanotubes with diameter of 30—50 nm have been synthesized on a porous alumina template by microwave plasma enhanced chemical vapor deposition (MW-PECVD). By this means, the control over either diameter or length of the nanotubes could be realized. The hollow structure and vertically aligned features have been verified by scanning electron and transmission electron microscopic images. In comparison with the reported fabrication methods, lower synthesis temperature (below 520 ℃) and simpler process (no negative dc bias applied) have been achieved, which could be of great importance for both theoretical research and pratical applications.

Key words: Carbon nanotube array, Microwave plasma, Chemical vapor deposition, Porous alumina template

CLC Number:

O613.71

TrendMD:

CHEN Xin, HU Zheng, WANG Xi-Zhang, WU Qiang, CHEN Yi, YANG Shao-Guang, DU You-Wei . Well-aligned Carbon Nanotube Array Synthesized at Low Temperature by Microwave Plasma Enhanced Chemical Vapor Deposition[J]. Chem. J. Chinese Universities, 2001, 22(5): 731.

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Well-aligned Carbon Nanotube Array Synthesized at Low Temperature by Microwave Plasma Enhanced Chemical Vapor Deposition

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