Chem. J. Chinese Universities ›› 2020, Vol. 41 ›› Issue (8): 1745.doi: 10.7503/cjcu20200110

• Articles: Inorganic Chemistry • Previous Articles     Next Articles

Preparation of Planar C2H5OH Fast Response Gas Sensor

NING Qiuyang, LI Wancheng   

  1. College of Electronic Science and Engineering, Jilin University, State Key Joint Laboratory of Integrated Optoelectronics, Changchun 130012, China
  • Received:2020-03-02 Online:2020-08-10 Published:2020-04-20
  • Supported by:
    Supported by the National Natural Science Foundation of China(No.61774076).

Abstract: A nanostructured InN-In2O3 composite material was prepared by chemical synthesis. Based on the synthetic material, we prepared a fast-response gas sensor for the detection of ethanol gas. Nano-sized In2O3 particles were synthesized by hydrothermal method, spin-coated on a ceramic substrate, and obtained an InN substrate after nitriding treatment. The InN substrate was then oxidized to synthesize a gas-sensitive material and a sensor device was prepared on a miniature planar electrode sheet. The morphology and composition of the materials were characterized and analyzed by means of scanning electron microscopy(SEM), transmission electron microscopy(TEM), X-ray diffractometer(XRD), and X-ray photoelectron spectroscopy(XPS). The results showed that the final InN-In2O3 nanocomposite with a pine-like structure was presented. The corresponding gas-sensitive performance of the device was also tested, and it was proved that the flat-type gas-sensitive sensor prepared based on this material has good gas-sensitive performance for ethanol gas:The sensitivity of detecting ethanol vapor at a concentration of 1.025 mg/m3(500 ppb) can reach 18; The response of detecting 2.05 mg/m3(1 ppm) ethanol the fastest recovery time is only 1s; the best working temperature is low, only 50℃.

Key words: Ethanol, In2O3, Nanocomposites, InN

CLC Number: