Chem. J. Chinese Universities ›› 2024, Vol. 45 ›› Issue (8): 20240146.doi: 10.7503/cjcu20240146
• Physical Chemistry • Previous Articles Next Articles
JIN Lei1(), WANG Zhaoyun2, YANG Fangzu3, ZHAN Dongping3
Received:
2024-03-27
Online:
2024-08-10
Published:
2024-07-03
Contact:
JIN Lei
E-mail:leijin@yznu.edu.cn
Supported by:
CLC Number:
TrendMD:
JIN Lei, WANG Zhaoyun, YANG Fangzu, ZHAN Dongping. Influence Mechanism of Synergistic Additives on the Nucleation and Coating Morphology and Structure of Copper Electronic Plating[J]. Chem. J. Chinese Universities, 2024, 45(8): 20240146.
Electrolyte | E/V | jm/(mA·cm‒2) | tm/s | Electrolyte | E/V | jm/(mA·cm‒2) | tm/s |
---|---|---|---|---|---|---|---|
VMS | -0.60 | -44.39 | 2.24 | VMS+PAN | -0.60 | -48.39 | 2.08 |
-0.65 | -100.60 | 0.55 | -0.65 | -103.80 | 0.49 | ||
-0.70 | -174.66 | 0.19 | -0.70 | -170.45 | 0.17 | ||
VMS+SPS | -0.60 | -41.42 | 2.41 | VMS+SPS +PAN | -0.60 | -22.65 | 5.55 |
-0.65 | -91.84 | 0.61 | -0.65 | -72.31 | 0.92 | ||
-0.70 | -143.86 | 0.21 | -0.70 | -137.40 | 0.27 |
Table 1 Maximum nucleation current( jm) and the corresponding time(tm) at different step potentials
Electrolyte | E/V | jm/(mA·cm‒2) | tm/s | Electrolyte | E/V | jm/(mA·cm‒2) | tm/s |
---|---|---|---|---|---|---|---|
VMS | -0.60 | -44.39 | 2.24 | VMS+PAN | -0.60 | -48.39 | 2.08 |
-0.65 | -100.60 | 0.55 | -0.65 | -103.80 | 0.49 | ||
-0.70 | -174.66 | 0.19 | -0.70 | -170.45 | 0.17 | ||
VMS+SPS | -0.60 | -41.42 | 2.41 | VMS+SPS +PAN | -0.60 | -22.65 | 5.55 |
-0.65 | -91.84 | 0.61 | -0.65 | -72.31 | 0.92 | ||
-0.70 | -143.86 | 0.21 | -0.70 | -137.40 | 0.27 |
Chemical | Peak | Raman shifts/cm-1 | Assignment | Ref. | Chemical | Peak | Raman shifts/cm-1 | Assignment | Ref. |
---|---|---|---|---|---|---|---|---|---|
Cl | A | 302 | ν(Cu—Cl) | [ | PAN | G | 689 | δ(CCC) n | [ |
H2SO4 | B | 898 | ν(S—OH) | [ | H | 725 | δ(CN=N) | [ | |
C | 982 | ν(SO42 ‒) | [ | I | 836 | δ(CCC) p | [ | ||
D | 1180 | ν(SO2) | [ | J | 1233 | ν(CN) | [ | ||
PAN | E | 617 | δ(CCC) n | [ | SPS | K | 868 | ν(CC) | [ |
F | 598 | δ(CCC) n | [ |
Table 2 Raman vibrational mode assignments
Chemical | Peak | Raman shifts/cm-1 | Assignment | Ref. | Chemical | Peak | Raman shifts/cm-1 | Assignment | Ref. |
---|---|---|---|---|---|---|---|---|---|
Cl | A | 302 | ν(Cu—Cl) | [ | PAN | G | 689 | δ(CCC) n | [ |
H2SO4 | B | 898 | ν(S—OH) | [ | H | 725 | δ(CN=N) | [ | |
C | 982 | ν(SO42 ‒) | [ | I | 836 | δ(CCC) p | [ | ||
D | 1180 | ν(SO2) | [ | J | 1233 | ν(CN) | [ | ||
PAN | E | 617 | δ(CCC) n | [ | SPS | K | 868 | ν(CC) | [ |
F | 598 | δ(CCC) n | [ |
Electrolyte | t/min | TC(%) | Electrolyte | t/min | TC(%) | ||||
---|---|---|---|---|---|---|---|---|---|
(111) | (200) | (220) | (111) | (200) | (220) | ||||
VMS | 1 | 100 | 0 | 0 | VMS+SPS | 1 | 100 | 0 | 0 |
2 | 93.3 | 6.7 | 0 | 2 | 57.5 | 10.3 | 32.2 | ||
5 | 46.7 | 16.6 | 36.7 | 5 | 13.7 | 8.7 | 77.6 | ||
10 | 8.4 | 7.1 | 84.5 | 10 | 2.3 | 1.8 | 95.9 | ||
VMS+PEG | 1 | 100 | 0 | 0 | VMS+PAN | 1 | 100 | 0 | 0 |
2 | 68.2 | 31.8 | 0 | 2 | 89.4 | 10.6 | 0 | ||
5 | 46.0 | 17.2 | 36.8 | 5 | 69.7 | 9.3 | 21.0 | ||
10 | 60.0 | 6.7 | 33.3 | 10 | 60.1 | 6.9 | 33.0 |
Table 3 TC of copper coating with a single additive at different time
Electrolyte | t/min | TC(%) | Electrolyte | t/min | TC(%) | ||||
---|---|---|---|---|---|---|---|---|---|
(111) | (200) | (220) | (111) | (200) | (220) | ||||
VMS | 1 | 100 | 0 | 0 | VMS+SPS | 1 | 100 | 0 | 0 |
2 | 93.3 | 6.7 | 0 | 2 | 57.5 | 10.3 | 32.2 | ||
5 | 46.7 | 16.6 | 36.7 | 5 | 13.7 | 8.7 | 77.6 | ||
10 | 8.4 | 7.1 | 84.5 | 10 | 2.3 | 1.8 | 95.9 | ||
VMS+PEG | 1 | 100 | 0 | 0 | VMS+PAN | 1 | 100 | 0 | 0 |
2 | 68.2 | 31.8 | 0 | 2 | 89.4 | 10.6 | 0 | ||
5 | 46.0 | 17.2 | 36.8 | 5 | 69.7 | 9.3 | 21.0 | ||
10 | 60.0 | 6.7 | 33.3 | 10 | 60.1 | 6.9 | 33.0 |
Electrolyte | t/min | TC(%) | Electrolyte | t/min | TC(%) | ||||
---|---|---|---|---|---|---|---|---|---|
(111) | (200) | (220) | (111) | (200) | (220) | ||||
VMS+PEG+SPS | 1 | 50.5 | 49.5 | 0 | VMS+SPS+PAN | 1 | 100 | 0 | 0 |
2 | 44.6 | 55.4 | 0 | 2 | 78.5 | 21.5 | 0 | ||
5 | 39.1 | 46.4 | 14.6 | 5 | 21.0 | 8.5 | 70.5 | ||
10 | 33.3 | 42.6 | 24.1 | 10 | 5.0 | 2.1 | 92.9 | ||
VMS+PEG+PAN | 1 | 100 | 0 | 0 | VMS+PEG+SPS+PAN | 1 | 52.4 | 47.6 | 0 |
2 | 77.4 | 22.6 | 0 | 2 | 50.4 | 49.6 | 0 | ||
5 | 45.3 | 18.2 | 36.5 | 5 | 45.3 | 39.8 | 14.9 | ||
10 | 30.8 | 14.6 | 54.7 | 10 | 39.9 | 40.3 | 19.8 |
Table 4 TC of copper coating with multiple additives at different time
Electrolyte | t/min | TC(%) | Electrolyte | t/min | TC(%) | ||||
---|---|---|---|---|---|---|---|---|---|
(111) | (200) | (220) | (111) | (200) | (220) | ||||
VMS+PEG+SPS | 1 | 50.5 | 49.5 | 0 | VMS+SPS+PAN | 1 | 100 | 0 | 0 |
2 | 44.6 | 55.4 | 0 | 2 | 78.5 | 21.5 | 0 | ||
5 | 39.1 | 46.4 | 14.6 | 5 | 21.0 | 8.5 | 70.5 | ||
10 | 33.3 | 42.6 | 24.1 | 10 | 5.0 | 2.1 | 92.9 | ||
VMS+PEG+PAN | 1 | 100 | 0 | 0 | VMS+PEG+SPS+PAN | 1 | 52.4 | 47.6 | 0 |
2 | 77.4 | 22.6 | 0 | 2 | 50.4 | 49.6 | 0 | ||
5 | 45.3 | 18.2 | 36.5 | 5 | 45.3 | 39.8 | 14.9 | ||
10 | 30.8 | 14.6 | 54.7 | 10 | 39.9 | 40.3 | 19.8 |
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