高等学校化学学报

高等学校化学学报 ›› 1998, Vol. 19 ›› Issue (9): 1462.

• 论文 • 上一篇    下一篇

脉冲激光沉积LiMn2O4薄膜的研究

杨海军1, 周鸣飞1, 秦启宗1, 蔡润良2, 吴浩青2   

  1. 1. 复旦大学激光化学研究所, 上海, 200433;
    2. 复旦大学化学系, 上海, 200433
  • 收稿日期:1997-07-14 出版日期:1998-09-24 发布日期:1998-09-24
  • 通讯作者: 秦启宗
  • 作者简介:杨海军,男,25岁,硕士研究生.
  • 基金资助:

    国家自然科学基金(批准号:29783001)资助课题.

A Study of Pulsed Laser Deposition of LiMn2O4 Thin Films

YANG Hai-Jun1, ZHOU Ming-Fei1, QIN Qi-Zong1, CAI Run-Liang2, WU Hao-Qing2   

  1. 1. Laser Chemistry Institute, Fudan University, Shanghai, 200433;
    2. Department of Chemistry, Fudan University, Shanghai, 200433
  • Received:1997-07-14 Online:1998-09-24 Published:1998-09-24

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摘要： 在氧气氛下采用355nm脉冲激光烧蚀制备了LiMn2O4薄膜,并用四极质谱和发光光谱技术考察了脉冲激光烧蚀过程及环境氧气对薄膜沉积过程的影响.质谱测定结果表明,355nm激光烧蚀LiMn2O4的产物主要有Li+、Mn+等离子和O2、O、LiO2、LiMnO、MnO及锂原子的多聚体等中性产物.不同氧气压下测定的发光光谱表明烧蚀原子在环境氧气氛中存在氧化过程.用循环伏安法和X射线衍射法对薄膜进行了表征.

关键词: 脉冲激光沉积, LiMn2O4, 薄膜

Abstract: The LiMn2O4 films have been prepared by 355 nm pulsed laser deposition on the heated stainless steel substrate in an O2 gas environment. The formation of the ablated species in the laser ablation process and the effect of O2 ambient have been investigated by both quadrupole mass spectrometry and optical emission spectroscopy. The measured mass spectra show that the main ablation products are Mn+, Li+, O2, O, LiO2, LiMnOand lithium atomic cluster. The dependence of ambient O2 pressure on the emission intensities of Mn containing species shows that the reactions of the ablated species with oxygen play an important role in the film deposition. The deposited LiMn2O4 films are characterized by XRDand cyclic voltammetry.

Key words: Pulsed laser deposition, LiMn2O4, Thin film

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