高等学校化学学报

高等学校化学学报

• 研究论文 • 上一篇    下一篇

衬底温度对Fe3N薄膜生长和磁性的影响

王丽丽1,2, 姜伟棣3, 赵利军1, 宫杰1, 郑伟涛2   

    1. 长春大学理学院, 长春 130022;
    2. 吉林大学材料科学与工程学院, 长春 130012;
    3. 中国计量学院理学院, 杭州 310018
  • 收稿日期:2008-03-21 修回日期:1900-01-01 出版日期:2009-01-10 发布日期:2009-01-10
  • 通讯作者: 郑伟涛

Effect of Substrate Temperature on Growth and Magnetic Properties of Nanocrystal Fe3N Thin Films

WANG Li-Li1,2, JIANG Wei-Di3, ZHAO Li-Jun1, GONG Jie1, ZHENG Wei-Tao2*   

    1. College of Science, Changchun University, Changchun 130022, China;
    2. Department of Materials Science and Engineering, Jilin University, Changchun 130012, China;
    3. Department of Physics, China Jiliang University, Hangzhou 310018, China
  • Received:2008-03-21 Revised:1900-01-01 Online:2009-01-10 Published:2009-01-10
  • Contact: ZHENG Wei-Tao

PDF (PC)

摘要： 采用直流磁控溅射方法, 以Si(100) 单晶片为衬底, 在衬底温度为150～450 ℃的范围内得到了ε-Fe3N薄膜样品. 利用 XRD, SEM和VSM等表征手段, 研究了衬底温度对ε-Fe3N薄膜的生长和磁性的影响. 实验结果表明, 随着衬底温度的升高, 薄膜的生长速率、晶粒尺寸和单位质量磁化强度均增大, 而矫顽力呈现先增加后减小的变化趋势, 当衬底温度为350 ℃时, 矫顽力达到最大值18.72 kA/m, 可以认为此时薄膜样品的晶粒尺寸接近于交换作用长度.

关键词: ε-Fe3N薄膜, 晶粒尺寸, 磁性, 交换作用长度

Abstract: The nanocrystal ε-Fe3N thin films were deposited on Si(100) substrate at different substrate temperatures of 150, 250, 350, 450 ℃ by DC magnetron sputtering. The structure, morphology and magnetic properties of the films deposited at different substrate temperature were characterized via X-ray diffraction(XRD), scanning electron microscopy(SEM) and vibrating sample magnetometer(VSM).The results show that ε-Fe3N has ferromagnetic properties, and its grain sizes, growth velocity and unsaturated magnetization measured at 400 kA/m field increase with increasing substrate temperature. The coercive force Hc increased to 18.72 kA/m at substrate temperature of 350 ℃ firstly, the Hc decreased with the substrate temperature increasing to 450 ℃. It can be deduced that exchange length (Lex) of nanocrystal ε-Fe3N thin films was about grain size 30 nm.

Key words: ε-Fe3N thin film, Grain size, Magnetic property, Exchange length

中图分类号: 

TrendMD: