A Study of Pulsed Laser Deposition of LiMn2O4 Thin Films

Abstract

Abstract: The LiMn₂O₄ films have been prepared by 355 nm pulsed laser deposition on the heated stainless steel substrate in an O₂ gas environment. The formation of the ablated species in the laser ablation process and the effect of O₂ ambient have been investigated by both quadrupole mass spectrometry and optical emission spectroscopy. The measured mass spectra show that the main ablation products are Mn⁺, Li⁺, O₂, O, LiO₂, LiMnOand lithium atomic cluster. The dependence of ambient O₂ pressure on the emission intensities of Mn containing species shows that the reactions of the ablated species with oxygen play an important role in the film deposition. The deposited LiMn₂O₄ films are characterized by XRDand cyclic voltammetry.

Key words: Pulsed laser deposition, LiMn₂O₄, Thin film

CLC Number:

O657.38

TrendMD:

YANG Hai-Jun, ZHOU Ming-Fei, QIN Qi-Zong, CAI Run-Liang, WU Hao-Qing . A Study of Pulsed Laser Deposition of LiMn₂O₄ Thin Films[J]. Chem. J. Chinese Universities, 1998, 19(9): 1462.

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A Study of Pulsed Laser Deposition of LiMn₂O₄ Thin Films

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