Chem. J. Chinese Universities ›› 2021, Vol. 42 ›› Issue (5): 1315.doi: 10.7503/cjcu20200675
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SHI Ying1,2, HU Guangjian1,3, WU Minjie1,3, LI Feng1,2,3()
Received:
2020-09-11
Online:
2021-05-10
Published:
2020-12-25
Contact:
LI Feng
E-mail:fli@imr.ac.cn
Supported by:
CLC Number:
TrendMD:
SHI Ying, HU Guangjian, WU Minjie, LI Feng. Applications of Low Temperature Plasma for the Materials in Li-ion Batteries[J]. Chem. J. Chinese Universities, 2021, 42(5): 1315.
Plasma technology | Applications for Li?ion battery | Advantage |
---|---|---|
Glow discharge plasma | Surface processing, such as etching and doping | Simple, inexpensive, wide pressure range |
Dielectric barrier discharge plasma(DBD) | Synthesis and polymerization of materials | Simple excitation, wide pressure range, large plasma discharge zone |
Radio frequency(RF) plasma | Synthesis of electrode materials and solid?state electrolytes, surface etching | Less charge accumulation |
Spark plasma sintering(SPS) | Synthesis of electrode materials and inorganic solid?state electrolytes | Short holding times, reduced temperature, pressure to achieve dense materials |
Plasma?enhanced chemical vapor deposition(PECVD) | Synthesis of thin films and coatings | Lower temperature for deposition and high film quality |
Magnetron sputtering | Synthesis of thin films and inorganic solid?state electrolytes | High film purity and density, good contact with the substrate and low damage to the substrate, controllable film thickness |
Plasma spray | Synthesis of thin films and coatings | High film quality and density, no damage to substrate |
Table 1 Plasma technologies commonly used for Li-ion batteries
Plasma technology | Applications for Li?ion battery | Advantage |
---|---|---|
Glow discharge plasma | Surface processing, such as etching and doping | Simple, inexpensive, wide pressure range |
Dielectric barrier discharge plasma(DBD) | Synthesis and polymerization of materials | Simple excitation, wide pressure range, large plasma discharge zone |
Radio frequency(RF) plasma | Synthesis of electrode materials and solid?state electrolytes, surface etching | Less charge accumulation |
Spark plasma sintering(SPS) | Synthesis of electrode materials and inorganic solid?state electrolytes | Short holding times, reduced temperature, pressure to achieve dense materials |
Plasma?enhanced chemical vapor deposition(PECVD) | Synthesis of thin films and coatings | Lower temperature for deposition and high film quality |
Magnetron sputtering | Synthesis of thin films and inorganic solid?state electrolytes | High film purity and density, good contact with the substrate and low damage to the substrate, controllable film thickness |
Plasma spray | Synthesis of thin films and coatings | High film quality and density, no damage to substrate |
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