高等学校化学学报

高等学校化学学报 ›› 2001, Vol. 22 ›› Issue (11): 1943.

• 研究简报 • 上一篇    下一篇

溶胶-凝胶法制备聚酰亚胺/二氧化钛感光杂化材料

刘丽, 路庆华, 印杰, 朱子康, 王宗光   

  1. 上海交通大学化学化工学院, 上海 200240
  • 收稿日期:2000-10-10 出版日期:2001-11-24 发布日期:2001-11-24
  • 通讯作者: 路庆华(1965年出生),男,博士,教授,主要从事功能材料及材料表面精细功能化研究.
  • 基金资助:

    国家自然科学基金(批准号:60087001);上海市科技“启明星”计划基金(批准号:99QE14013)资助

Preparation of Photosensitive Polyimide/Titania Hybrid by Sol-gel Method

LIU Li, LU Qing-Hua, YIN Jie, ZHU Zi-Kang, WANG Zong-Guang   

  1. School of Chemistry and Chemical Technology, Shanghai Jiaotong University, Shanghai 200240, China
  • Received:2000-10-10 Online:2001-11-24 Published:2001-11-24

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被引次数

69

关键词: 杂化材料, 感光聚酰亚胺, 光刻, 二氧化钛, 溶胶-凝胶法

Abstract: Photosensitive polyimide/titania hybrid was prepared successfully by sol gel process. This hybrid material posseses a good photolithographic property under UVexposure. The introduction of titania leads to the increase in refractive index of the hybrid.

Key words: Hybrid, Photosensitive polyimide, Photolithographic property, Titania, Sol gel process

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