高等学校化学学报 ›› 1998, Vol. 19 ›› Issue (7): 1140.

• 论文 • 上一篇    下一篇

添加氧影响下低压金刚石生长的条件

刘志杰, 万永中, 张卫, 张剑云, 王季陶   

  1. 复旦大学电子工程系, 上海, 200433
  • 收稿日期:1997-05-19 出版日期:1998-07-24 发布日期:1998-07-24
  • 通讯作者: 王季陶
  • 作者简介:刘志杰,男,26岁,博士研究生.
  • 基金资助:

    国家自然科学基金(批准号:59772029)和"八六三"高科技基金(批准号:863-715-010-0050)资助课题.

Diamond Growth Condition at Low-Pressure Influenced by Addition of Oxygen

LIU Zhi-Jie, WAN Yong-Zhong, ZHANG Wei, ZHANG Jian-Yun, WANG Ji-Tao   

  1. Department of Electronic Engineering, Fudan University, Shanghai, 200433
  • Received:1997-05-19 Online:1998-07-24 Published:1998-07-24

摘要: 采用非平衡热力学耦合模型研究金刚石在CO-H2、CO-O2-H2体系中的生长情况,计算不同氧含量下的金刚石生长相图,固定氧氢比考察压力变化对金刚石生长区的影响,讨论了不同氧氢含量对金刚石生长区的影响。与经典的平衡热力学理论计算所得的相图不同,本文的相图均有金刚石生长区,可以很好地解释低压下金刚石在气相中的生长,还可以用于指导低压金刚石生长的实验研究。

关键词: 非平衡热力学, 相图, 金刚石

Abstract: Diamond growth using CO-H2and CO-O2-H2as input gases was studied based on the non-equilibrium thermodynamic coupling model. The phase diagrams of diamond growth with different content of oxygen in the reaction system were calculated. The diagrams have diamond growth regions, which were different from the diagrams based on classical equilibrium thermodynamics. Also, the diamond growth regions at different system pressures and different contents of oxygen were discussed in this paper. These results can guide the experimental study on diamond growth at low-pressure because the theoretical phase diagrams coordinate very well with the experimental results which had been published.

Key words: Non-equilibrium thermodynamics, Phase diagram, Diamond

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