高等学校化学学报

高等学校化学学报

• 研究论文 • 上一篇    下一篇

磁控溅射制备MoON薄膜电极及其电化学储能性质

万志鑫，余威，张敏轩，徐格，冒爱琴   

  1. 安徽工业大学先进金属材料绿色制造与表面技术教育部重点实验室
  • 收稿日期:2025-08-04 修回日期:2025-10-15 网络首发:2025-10-17 发布日期:2025-10-17
  • 通讯作者: 万志鑫 E-mail:wanzhx@ahut.edu.cn
  • 基金资助:
    安徽省高校科研项目（批准号：RZ2400002951）资助

Magnetron-Sputtered MoON Thin Film electrode for High-Performance Electrochemical Energy Storage

WAN Zhixin, YU Wei, ZHANG Minxuan, XU Ge, MAO Aiqin   

  1. Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials, Ministry of Education, Anhui University of Technology
  • Received:2025-08-04 Revised:2025-10-15 Online First:2025-10-17 Published:2025-10-17
  • Contact: Zhi-Xin WAN E-mail:wanzhx@ahut.edu.cn
  • Supported by:
    Supported by the Natural Science Foundation of Anhui Provincial Education Department, China(No.RZ2400002951)

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摘要： 采用磁控溅射法制备了具有梯度氧含量的MoON薄膜材料，系统研究了制备过程中N2/O2分压对MoON薄膜微观结构、晶型、化学键合、导电性以及电化学性能的影响。结果表明，在优化氧含量下，即: 当Ar/N2/O2的流量(sccm)比为240/50/10时，MoON薄膜电极材料展现出最优的电化学储能性质，在1 M Na2SO4溶液中，其面积比电容从纯MoN薄膜电极的134 mF·cm-2提升至211 mF·cm-2，增加了57.5%，而且具有优异的循环稳定性，在充放电10000次之后电容值没有衰减。

关键词: MoON薄膜, 磁控溅射, 薄膜电极, 电化学性能

Abstract: MoON thin films with gradient oxygen content were prepared by magnetron sputtering. The effects of N2/O2 partial pressures during the preparation process on the microstructure, crystallinity, chemical bonding, electrical conductivity and electrochemical performance of MoON thin film electrodes were systematically studied. Representative results revealed that when the flow rate (sccm) ratio of Ar/N2/O2 was 240/50/10, the MoON thin-film electrode exhibited the optimal performance. In a 1 M Na2SO4 solution, its capacitance per unit area increased from 134 mF·cm-2 (pure MoN thin-film electrode) to 211 mF·cm-2, with an increase of 57.5%. Moreover, it has excellent cycle stability with no capacitance retention decay after 10,000 charge and discharge cycles.

Key words: MoON film, Magnetron sputtering, Thin film electrode, Electrochemical property

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