高等学校化学学报 ›› 2011, Vol. 32 ›› Issue (8): 1785.

• 研究论文 • 上一篇    下一篇

Zr0.5Ti0.5O2纳米薄膜的光电性能

张海峰, 张敏, 阮圣平, 孟凡旭, 冯彩慧, 徐洋, 陈维友, 张歆东   

  1. 集成光电子学国家重点联合实验室吉林大学实验区, 吉林大学电子科学与工程学院, 长春 130012
  • 收稿日期:2011-06-01 修回日期:2011-06-27 出版日期:2011-08-10 发布日期:2011-07-19
  • 通讯作者: 张歆东 E-mail:xindong@jlu.edu.cn
  • 基金资助:

    国家自然科学基金(批准号: 60977031, 50977038)资助.

Photoelectric Properties of Zr0.5Ti0.5O2 Nano Thin Films

ZHANG Hai-Feng, ZHANG Min, RUAN Sheng-Ping, MENG Fan-Xu, Feng Cai-Hui, XU Yang, CHEN Wei-You, ZHANG Xin-Dong*   

  1. State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • Received:2011-06-01 Revised:2011-06-27 Online:2011-08-10 Published:2011-07-19
  • Contact: ZHANG Xin-Dong E-mail:xindong@jlu.edu.cn
  • Supported by:

    国家自然科学基金(批准号: 60977031, 50977038)资助.

摘要: 采用溶胶-凝胶法制备了Zr0.5Ti0.5O2固溶体薄膜,通过X-射线衍射分析(XRD)、扫描电镜分析(SEM)、紫外吸收光谱(UV-Vis)和X射线光电子能谱(XPS)等方式对材料进行了表征。结果表明实验制得的材料Zr:Ti=1:1,薄膜表面平整、致密、光滑,皲裂情况较单纯的TiO2和ZrO2薄膜有明显改进;另外由于Zr的掺入,薄膜在紫外光波段有良好的吸收,吸收边较TiO2薄膜有明显的蓝移。通过标准的光刻剥离技术和磁控溅射技术在Zr0.5Ti0.5O2纳米薄膜上制作了叉指型的金属电极。在5V偏压下,样品对可见光不吸收,对260 nm的紫外光有明显的光电响应,光电流与暗电流之比近3个数量级。

关键词: 溶胶-凝胶法, ZrxTi1-xO2纳米薄膜, 光电性能

Abstract: Zr0.5Ti0.5O2 thin films were prepared by a sol-gel method and characterized by means of XRD, SEM, XPS and UV-visible absorption spectra. XPS analysis indicated that the atom ratio between Zr and Ti is 1:1. SEM shows that the surface of Zr0.5Ti0.5O2 film is flat and not chapped, which is better than that of pure ZrO2 and TiO2 film. In addition, the film’s abortion edge shows obvious blue shift with the Zr doping. Based on the Zr0.5Ti0.5O2 thin film, planar interdigitated electrodes were prepared and then tested. At 5 V bias, the sample was insensitive to visible light but exhibit significant response under the irradiation of 260 nm UV light.

Key words: Sol-gel method, ZrxTi1-xO2 nano thin film, Photoelectric property

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