Abstract: Diamond-like films have been prepared by using high power and high frequency excimer laser under a high vacuum, H₂and N₂gas environment respectively.The structure of the films was studied by Raman spectruMAnd electron diffraction method.The measurement results of Raman spectroscopy show a typical characteristic of that DLC films with Gpeak at about 1528cm^-1, and a shoulder shape Dpeak at 1327cm^-1. The electron-diffraction pattern has a polycrystalline electron diffraction feature, five diffraction rings were observed.The lattice spacing calculated from these ringSISIn agreement with that of cubic diamond.Diamond-like films on Ge substrate possess antireflectance property in infrared.Morphology of the films were observed by AFMAnd SEM, hardness and adhesion of the films are 1621 kg/mm²and 2.2 GPa, respectively.

Key words: Excimer laser, Diamond-like films, Structure feature