Abstract: By using both optical emission spectroscopy and time-of-filght mass spectrometry,355 nm laser ablation of AgCl,CuCl and CuCl₂ was investigated,The optical emission spectra of plasma plume produced by laser ablated AgCl and CuCl show that the Cu and Ag atomic emission dominates in the spectral region 300～500 nm.The observed sharp lines can be assigned by the transitions of excited metal atoms.The dependence of emission line intensity on the laser fluence implies that the multiphoton absorption plays an important role in the laser ablation process.The time-of-flight mass spectra show that mainly positive and negative ions produced by laser ablation are Ag⁺and Cl^-,AgCl₂^-、Ag₂Cl₃^- for AgCl.Cu⁺,Cu₂Cl⁺、Cu₃Cl₂⁺ and Cl^-,CuCl^-,CuCl₂^-、Cu₂Cl₃^-for CuCl,respectively.Possible mechanisms for the production of these ions in the UVlaser ablation process are discussed.

Key words: Laser ablation, Metal chlorides, Optical emission spectroscopy, Time-of-flight mass spectrum