高等学校化学学报

高等学校化学学报 ›› 2003, Vol. 24 ›› Issue (11): 2048.

• 论文 • 上一篇    下一篇

高功率准分子激光沉积类金刚石膜的结构及性能

彭鸿雁1, 金曾孙1, 李俊杰1, 申辉2, 赵立新2, 申家镜2   

  1. 1. 吉林大学超硬材料国家重点实验室, 长春 130023;
    2. 黑龙江省光电技术研究所, 牡丹江 157000
  • 收稿日期:2002-12-30 出版日期:2003-11-24 发布日期:2003-11-24
  • 通讯作者: 金曾孙(1941年出生),男,教授,博士生导师,主要从事金刚石膜的制备及应用研究.E-mail:diamond@jlu.edu.cn E-mail:diamond@jlu.edu.cn
  • 基金资助:

    国家“八六三”新材料领域Z38-02项目(批准号:2002AA325090)资助

Structure and Properties of Diamond-like Film Prepared by Excime Laser with High Power and High Frequency

PENG Hong-Yan1, JIN Zeng-Sun1, LI Jun-Jie1, SHEN Hui2, ZHAO Li-Xin2, SHEN Jia-Jing2   

  1. 1. National Laboratory of Superhard Materials, Jilin University, Changchun 130023, China;
    2. Heilongjiang Institute of Optic-electric Technology, Mudanjiang 157000, China
  • Received:2002-12-30 Online:2003-11-24 Published:2003-11-24

PDF (PC)

被引次数

18

摘要： 采用高功率和高频率准分子激光器在高真空及H2和N2气氛下沉积类金刚石膜.利用Raman光谱和电子衍射方法分析了膜的微结构.Raman光谱呈典型DLC膜的特征,G峰位于1528cm-1,D峰位于1327cm-1,为一大的肩峰,电子衍射图象呈多晶电子衍射特征,可观察到5个同心圆环,由此计算出的面间距与金刚石(111),(200),(220),(331)和(332)面间距相符.红外吸收光谱测量结果表明,在Ge片上单面镀类金刚石膜具有明显的红外增透效果,在1000～3000cm-1范围内红外透过率达到55%以上.用原子力显微镜和SEM观察了表面形貌,用显微硬度计和显微划痕仪测试了膜的硬度与附着力.

关键词: 准分子激光器, 类金刚石膜, 结构特性

Abstract: Diamond-like films have been prepared by using high power and high frequency excimer laser under a high vacuum, H2and N2gas environment respectively.The structure of the films was studied by Raman spectruMAnd electron diffraction method.The measurement results of Raman spectroscopy show a typical characteristic of that DLC films with Gpeak at about 1528cm-1, and a shoulder shape Dpeak at 1327cm-1. The electron-diffraction pattern has a polycrystalline electron diffraction feature, five diffraction rings were observed.The lattice spacing calculated from these ringSISIn agreement with that of cubic diamond.Diamond-like films on Ge substrate possess antireflectance property in infrared.Morphology of the films were observed by AFMAnd SEM, hardness and adhesion of the films are 1621 kg/mm2and 2.2 GPa, respectively.

Key words: Excimer laser, Diamond-like films, Structure feature

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