高等学校化学学报 ›› 2002, Vol. 23 ›› Issue (9): 1735.

• 研究论文 • 上一篇    下一篇

氢气流量对金刚石膜生长的影响研究

杨广亮1, 王立秋2, 吕宪义1, 金曾孙1   

  1. 1. 超硬材料国家重点实验室;
    2. 吉林大学, 物理学院, 长春 130023
  • 收稿日期:2001-10-16 出版日期:2002-09-24 发布日期:2002-09-24
  • 通讯作者: 杨广亮(1970年出生),男,博士,主要从事金刚石厚膜研究.E-mail:ygliang@sohu.com E-mail:ygliang@sohu.com

Effect of Hydrogen Gas Flow Rate on the Deposition of Diamond Films

YANG Guang-Liang1, WANG Li-Qiu2, LÜ Xian-Yi1, JIN Zeng-Sun1   

  1. 1. State Key Lab for Superhard Materials;
    2. College of Physics, Jilin University, Changchun 130023, China
  • Received:2001-10-16 Online:2002-09-24 Published:2002-09-24

摘要: 研究了电子辅助热灯丝法生长金刚石厚膜过程中氢气流量对沉积速度和膜品质的影响.随氢气流量从100增加到750cm3/min,金刚石膜的沉积速率单调上升,但金刚石膜品质不断下降,从750到1000cm3/min,金刚石膜沉积速率下降,但金刚石膜品质随氢气流量增加而提高.拉曼光谱和电子顺磁共振谱研究发现,在所制备的金刚石膜中含有替代形式的氮,氮含量随氢气流量的增加而减小,1000cm3/min流量下沉积的金刚石膜的含氮量仅为100cm3/min流量下沉积的金刚石膜的1/40.

关键词: 金刚石膜, 顺磁氮, 顺磁共振

Abstract: Thick diamond films have been deposited by Electron Assisted Hot Filament Chemical Vapor Deposition Method. The effects of hydrogen gas flow rate on the diamond films growth rate and diamond qualities have been studied. It is found that, with the gas flow rate increasing, in the range of 100 to 750 cm3/min, the diamond films growth rates increase while the diamond qualities get worse, and in the range of 750 to 1000 cm3/min the diamond films growth rates decrease whilethe diamond qualities are improved. Raman spectroscopy and Electron Paramagnetic Resonance has been used to detect the impurities of Nitrogen. The concentration of nitrogen in the diamond film decreases with the increase of gas flow rate, and it is 40 times higher in diamond films deposited at 100 cm3/min than that at 1000 cm3/min.

Key words: Diamond films, Paramagnetic nitrogen, Electron paramagnetic resonance

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