高等学校化学学报 ›› 1995, Vol. 16 ›› Issue (S1): 46.

• 研究论文 • 上一篇    下一篇

Two-dimensional Raman Imaging Analysis of Microcrystal Diamond Film

Toshihiro Minabe, Kazuhito Hashimoto, Akira Fujishima   

  1. Department of Applied Chemistry, Faculty of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
  • 收稿日期:1995-08-10 出版日期:1995-12-31 发布日期:1995-12-31

Two-dimensional Raman Imaging Analysis of Microcrystal Diamond Film

Toshihiro Minabe, Kazuhito Hashimoto, Akira Fujishima   

  1. Department of Applied Chemistry, Faculty of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
  • Received:1995-08-10 Online:1995-12-31 Published:1995-12-31

摘要:

Two-dimensional distributions of the impurity carbon (sp2-bonded carbon), crystallinity, and tensile stresses in a(Ⅲ) oriented diamond crystal of a diamond thin film were studied by using Raman imaging microscopy. The amount of the impurity carbon was more in the center of (Ⅲ) plane than in the circumference of the plane. The crystallinity and tensile stress were also higher in the center than in the circumference. Based on those two-dimesional distributions, we discuss the boundary structure between diamond carbon and sp2-bonded carbon in CVD diamond.

关键词: Raman imaging, Diamond film, Crystalllinity, Stress, Impurity, Two-dimensional, Spectroscopy

Abstract:

Two-dimensional distributions of the impurity carbon (sp2-bonded carbon), crystallinity, and tensile stresses in a(Ⅲ) oriented diamond crystal of a diamond thin film were studied by using Raman imaging microscopy. The amount of the impurity carbon was more in the center of (Ⅲ) plane than in the circumference of the plane. The crystallinity and tensile stress were also higher in the center than in the circumference. Based on those two-dimesional distributions, we discuss the boundary structure between diamond carbon and sp2-bonded carbon in CVD diamond.

Key words: Raman imaging, Diamond film, Crystalllinity, Stress, Impurity, Two-dimensional, Spectroscopy

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