高等学校化学学报 ›› 1995, Vol. 16 ›› Issue (S1): 46.
Toshihiro Minabe, Kazuhito Hashimoto, Akira Fujishima
Toshihiro Minabe, Kazuhito Hashimoto, Akira Fujishima
摘要:
Two-dimensional distributions of the impurity carbon (sp2-bonded carbon), crystallinity, and tensile stresses in a(Ⅲ) oriented diamond crystal of a diamond thin film were studied by using Raman imaging microscopy. The amount of the impurity carbon was more in the center of (Ⅲ) plane than in the circumference of the plane. The crystallinity and tensile stress were also higher in the center than in the circumference. Based on those two-dimesional distributions, we discuss the boundary structure between diamond carbon and sp2-bonded carbon in CVD diamond.
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