离子束溅射法制备非晶态和晶态Ti-Ni贮氢薄膜合金

高等学校化学学报 ›› 1993, Vol. 14 ›› Issue (2): 263.

离子束溅射法制备非晶态和晶态Ti-Ni贮氢薄膜合金

胡伟康¹, 申泮文¹, 张允什²

1. 南开大学化学系, 天津 300071;
2. 南开大学新能源材料化学研究所

收稿日期:1992-09-29 出版日期:1993-02-24 发布日期:1993-02-24
通讯作者: 胡伟康
基金资助:
国家863计划资助课题

The Film Preparation of Amorphous and Crystalline Ti-Ni Hydrogen Storage Alloys by Ion Beam Sputtering

HU Wei-Kang¹, SHEN Pan-Wen¹, ZHANG Yun-Shi²

1. Department of Chemistry, Nankai University, Tianjin, 300071;
2. Institute of New Energy Material Chemistry, Nankai University, Tianjin

Received:1992-09-29 Online:1993-02-24 Published:1993-02-24

摘要/Abstract

关键词: 贮氢薄膜, Ti-Ni合金, 离子束溅射法

Abstract: Amorphous Ti0.88Ni1.00 and Ti0.69Ni1.00 alloy films were prepared by means of ion beam sputtering using a TiNi and a Ti₂Ni alloy taigets.Crystalline films were obtained on annealing the amorphous at about 660 Kand the pressure of 9×10^-4 Pa.The film structure and transformation of amorphous were characterised by X-ray diffraction and electron diffraction respectively.

Key words: Hydrogen storage film, Ti-Ni alloy, Ion beam sputtering

TrendMD:

胡伟康, 申泮文, 张允什. 离子束溅射法制备非晶态和晶态Ti-Ni贮氢薄膜合金. 高等学校化学学报, 1993, 14(2): 263.

HU Wei-Kang, SHEN Pan-Wen, ZHANG Yun-Shi. The Film Preparation of Amorphous and Crystalline Ti-Ni Hydrogen Storage Alloys by Ion Beam Sputtering. Chem. J. Chinese Universities, 1993, 14(2): 263.