Silicon(Si) has high theoretical capacity, low voltage platform and abundant natural resources, which has the potential to become the next generation high energy density lithium ion batteries anode material. However, Si has low inherent conductivity and great volume change in the cycle process, which is different from graphite and should not be directly used as an anode material. Therefore, many modification strategies have been developed to improve or adapt to Si based anode materials from dimension structure, composites, binders and electrolytes, so as to meet the requirements of commercialization. In this paper, the research pro-gress of Si based anode materials in recent years was reviewed, the design elements of different aspects were summarized, and the performance of representative materials was introduced. Finally, the problems faced by Si based anode materials were briefly analyzed, and the research prospect of Si based anode materials as lithium ion batteries was forecasted.