Chem. J. Chinese Universities ›› 2025, Vol. 46 ›› Issue (12): 20250220.doi: 10.7503/cjcu20250220

• Physical Chemistry • Previous Articles     Next Articles

Magnetron-Sputtered MoON Thin Film Electrode for High-performance Electrochemical Energy Storage

WAN Zhixin(), YU Wei, ZHANG Minxuan, XU Ge, MAO Aiqin()   

  1. Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials,Ministry of Education,School of Materials Science and Engineering,Anhui University of Technology,Ma’anshan 243002,China
  • Received:2025-08-04 Online:2025-12-10 Published:2025-10-17
  • Contact: WAN Zhixin E-mail:wanzhx@ahut.edu.cn;maoaiqinmaq@163.com
  • Supported by:
    the Natural Science Research Project of Anhui Provincial Educational Committee, China(RZ2400002951)

Abstract:

MoON thin films with gradient oxygen content were prepared by magnetron sputtering. The effects of N2/O2 partial pressures during the preparation process on the microstructure, crystallinity, chemical bonding, electrical conductivity and electrochemical energy storage performance of MoON thin film electrodes were studied. The results reveal that when the flow rate(sccm) ratio of Ar/N2/O2 is 240∶50∶10, the MoON thin-film electrode exhibits the optimal energy storage performance. In a 1 mol/L Na2SO4 solution, its capacitance per unit area increases from 134 mF/cm²(pure MoN thin-film electrode) to 211 mF/cm², with an increase of 57.5%. Moreover, it has excellent cycle stability with no capacitance retention decay after 10000 charge and discharge cycles.

Key words: MoON film, Magnetron sputtering, Thin film electrode, Electrochemical energy storage property

CLC Number: 

TrendMD: