Abstract: Solid-state nanopore films are used widely in biological detection, life and health, and other sectors because they are more chemically, mechanically, and thermally stable than traditional biological nanopore films. Using a multi-target magnetron co-sputtering system, silver (Ag) nanowire array-silicon dioxide (SiO2) composite metamaterial films were created. The Ag nanowire arrays were selectively dissolved by hydrogen peroxide (H2O2) solution, and chemical wet etching produced SiO2 solid nanopore array films with an average diameter of about 5 nm. X-ray diffraction, inductively coupled plasma optical emission spectroscopy and spectroscopic ellipsometry were used to confirm the complete dissolution of Ag nanowires in H2O2 solution, and the chemical reaction mechanism between Ag nanowires and H2O2 was clarified. In addition, scanning electron microscopy and small-angle X-ray scattering were used to characterize the morphology and microstructure size of SiO2 solid state nanopore array. In this study, SiO2 solid state nanopore arrays with a diameter of less than 10 nm were successfully fabricated, which provides a new idea for the efficient preparation of solid-state nanopore arrays.

Key words: Solid state nanopore, Chemical wet etching, Ag nanowire array, Dissolution, Magnetron sputtering