Abstract: Eight different silicon-containing vinyl ether monomers were synthesized by the substitution reaction of hydroxyl-containing monovinyl ether with various chlorosilanes and chlorosiloxanes. It is a effective method to obtain silicon-containing vinyl ethers because of simple process and high yield. The physical and chemical properties and photocuring kinetics of these photosensitive compounds initiated by PAG201 were investigated by Integrated Thermal Gravimetric Analyzer and Real Time Infrared. The study on properties indicated that there are six monomers with the appropriate viscosity and six monomers had good thermal stability. The photopolymerization kinetic results showed that an increase of the initiator content (< 2.4wt %) strongly accelerated the photopolymerization of the photocuring monomers and the maximum of the polymerization rate was achieved earlier. The performance of photopolymerization of the difunctional monomers was superior to monofunctional monomers. Silicon-containing vinyl ethers had a very fast curing rate and could enhance the DC% by increasing the PAG content or the light intensity.