Abstract: Microtransfer molding (μTM) is a kind of soft lithography for polymer micropatterning. In μTM, a liquid prepolymer (or concentrated polymer solution) is applied to the patterned surface of an elas-tomeric mold and then brought into the contact with a substrate. After prepolymer is cured thermally or by UVlight, the elastomeric mold is peeled away. Apattern is left on the surface of the substrate. In this study, ～300 nm lines and three-dimensional patterns of PMMA and epoxy on planar and/or non-planar substrates are realized.

Key words: Microtransfer molding, Micropatterning, Elastomeric stamp