Chem. J. Chinese Universities ›› 2000, Vol. 21 ›› Issue (1): 14.

• Articles • Previous Articles     Next Articles

Preparation of Pd-Y Alloy Membranes on Porous Alumina by MOCVD Using Mixed Metal β-Diketone as Precursors

XIA Chang-Rong, GUO Xiao-Xia, WANG Xue-Jun, CHEN Chu-Sheng, PENG Ding-Kun, MENG Guang-Yao   

  1. Department of Materials Science and Engineering, University of Science and Technology of China, Hefei 230026, China
  • Received:1999-05-05 Online:2000-01-24 Published:2000-01-24

Abstract: A metal-organic chemical vapor deposition (MOCVD) process with metal β-diketone as precursor was applied to preparing Pd and Pd-Y alloy composite membranes on porous alumina substrates. A palladium phase membrane consisting of primary crystallites with dimension of around 30 nm×10 nm was deposited when a single Pd(AcAc)2 precursor was used. With a mixed precursor of 8Pd(AcAc)2+Y(AcAc)3, uniform and dense Pd-Y alloy membranes were reproducibly formed. The alloy membranes consisted of primary crystallites with a dimension of 21 nm×10 nm , which is much smaller than that of pure Pd membranes. XPS studies revealed that the content of Y in the Pd-Y alloy membranes was less than that in the mixed precursor. This goes along with the results of thermal gravimetric analysis of metal β-diketones, which showed that the volatility of Y(AcAc)3 was lower than that of Pd(AcAc)2. Hydrogen testing showes that the flux of a Pd-Y alloy membrane is much higher than that of a Pd membrane at the temperature investigated. And Pd-Y alloy membranes were more stable than Pd membranes.

Key words: Pd-Y alloy, β-Diketone, MOCVD, Ceramic-metal composite membrane

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