Abstract: The atomization mechanism of germanium is discussed on the basis of observation of atomization behavior of germanium and enhancement effects of HNO₃, HClO₄ and organic compounds on absorption signal of Ge in graphite furnace. It is affirmed that two types of reduction reaction in atomization process are existed.GeO₂(s)+C→GeO(g)+CO and GeO₂(s)+CO→GeO(g) +CO₂ .The appearancetemperature of Ge experimentally was measured to be 2150K.The △H° value of Ge is 138.5 kcal/mol calculated by using △H° =γT_app.It is corresponding to the dissociation energy of the Ge-Obond(l58.8 kcal/mol). The germanium atoms in vapor phase are formed which is due to the thermal decomposition of GeO(g).