Abstract: A sensitive method for the determination of trace elements in alloy steels by using arc sampling combined with ICP-AES has been developed. The d.c. arc discharge as a vaporization device is used to produce metal vapour from sample surface, and then the vapour is introduced to ICP by carrier gas Ar. The behaviour of sample vaporization, the effect of discharge gas and matrix, and TCPexcitation parameters were investigated. The detection limits are in the range of 0.x to x μg/g. The method has been applied to the analysis of some low-alloy and high-alloy steels, and the results obtained are in good agreement with the values of NBS.