射频磁控溅射CNx薄膜的结构与衬底温度关系的研究
曹培江, 姜志刚, 李俊杰, 金曾孙, 王欣, 郑伟涛, 李哲奎
Studies on the Relationship Between Substrate Temperature and Structure of CNx Thin Films Deposited by R.F. Magnetron Sputtering
CAO Pei-Jiang, JIANG Zhi-Gang, LI Jun-Jie, JIN Zeng-Sun, WANG Xin, ZHENG Wei-Tao, LI Zhe-Kui
高等学校化学学报
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2002, (2): 275
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