轰击离子能量对CNx薄膜中sp3型C-N键含量的影响
李俊杰, 曹培江, 郑伟涛, 吕宪义, 卞海蛟, 金曾孙
Influence of Bombarding Ions Energy on the Content of sp3C-N Bonds in Carbon Nitride Films
LI Jun-Jie, CAO Pei-Jiang, ZHENG Wei-Tao, LU Xian-Yi, BIAN Hai-Jiao, JIN Zeng-Sun
高等学校化学学报
.
2003, (5): 880
-883
.
