高功率准分子激光沉积类金刚石膜的结构及性能
彭鸿雁, 金曾孙, 李俊杰, 申辉, 赵立新, 申家镜
Structure and Properties of Diamond-like Film Prepared by Excime Laser with High Power and High Frequency
PENG Hong-Yan, JIN Zeng-Sun, LI Jun-Jie, SHEN Hui, ZHAO Li-Xin, SHEN Jia-Jing
高等学校化学学报
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2003, (11): 2048
-2050
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