高等学校化学学报

高等学校化学学报

• 研究论文 • 上一篇    下一篇

飞秒激光改性玻璃微结构的化学腐蚀特性研究

蒋鲁杰, 戴能利, 王英, 张继皇, 陆培祥   

  1. 华中科技大学光电子科学与工程学院, 武汉光电国家实验室, 武汉 430074
  • 收稿日期:2006-10-21 修回日期:1900-01-01 出版日期:2007-06-10 发布日期:2007-06-10
  • 通讯作者: 戴能利

Chemical Etching Properties of Micro-structure in Glasses Modified by Femtosecond Laser Pulses

JIANG Lu-Jie, DAI Neng-Li*, WANG Ying, ZHANG Ji-Huang, LU Pei-Xiang   

  1. Wuhan National Laboratory for Optoelectronics, School of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
  • Received:2006-10-21 Revised:1900-01-01 Online:2007-06-10 Published:2007-06-10
  • Contact: DAI Neng-Li

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被引次数

7

摘要： 采用飞秒激光改性-化学腐蚀的方法, 分别研究了3种典型玻璃的化学腐蚀性能. 通过测试材料的微观结构, 分析了不同材料的腐蚀速率与脉冲能量及腐蚀时间的关系, 从材料组成、显微结构及化学键特征讨论了玻璃改性-腐蚀机理. 结果表明, 飞秒激光改性后的碲酸盐和PbO硅酸盐玻璃不具有选择性腐蚀特性, 而石英玻璃的选择性腐蚀比高于40; 飞秒激光改性玻璃的选择性腐蚀特性与材料结构有关, 分子体积大、网络结构不紧密的材料不具有选择腐蚀特性.

关键词: 飞秒激光, 化学腐蚀, 玻璃微结构

Abstract: The chemical etching properties of micro-structure in three typical glasses modified with femtose-cond laser were studied. The micro-structure changes before and after etching were observed. The depen-dences of etching rate on the pulse energy and etching duration were revealed. The mechanisms of glass modifying-chemical etching were discussed. The results show that the femtosecond laser modified tellurite and lead silicate glass have no chemical selective etching, but the selective etching rate of silica glass is higher than 40. The character of chemical selective etching of femtosecond laser modified glass largely depends on the matrix local structures, the glass with a lager molecule volume has no properties of chemical selective etching, such as tellurite and lead silicate glass.

Key words: Femtosecond laser, Chemical etching, Micro-structure of glasses

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