从晶体取向特点探讨ZnO薄膜的晶体不完整性

高等学校化学学报 ›› 2006, Vol. 27 ›› Issue (5): 805.doi:

从晶体取向特点探讨ZnO薄膜的晶体不完整性

侯长民¹, 黄科科¹, 高忠民¹, 马艳², 杜国同², 李向山¹, 冯守华¹

1. 吉林大学无机合成与制备化学国家重点实验室, 化学学院;
2. 吉林大学电子科学与工程学院, 集成光电子学国家重点实验室, 长春 130012

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2006-05-10 发布日期:2006-05-10
通讯作者: 冯守华

Studies on Crystal Structure of ZnO Films by the Mis-orientation

HOU Chang-Min¹, HUANG Ke-Ke¹, GAO Zhong-Min¹, MA Yan², DU Guo-Tong², LI Xiang-Shan¹, FENG Shou-Hua ^1*

1. State Key Laboratory of Inorganic Synthesis and Preparative Chemistry, College of Chemistry;
2. College of Electronic and Engineering, State Key Lab on Integrated Optoelectronics, Jilin University, Changchun 130012, China

Received:1900-01-01 Revised:1900-01-01 Online:2006-05-10 Published:2006-05-10
Contact: FENG Shou-Hua

摘要/Abstract

摘要：

用MOCVD法在蓝宝石衬底上得到了ZnO(0002)膜, 并用XRD和SEM进行了表征. 结果表明，薄膜中沿［0001］择优取向生长的柱状晶垂直于衬底表面, 晶柱之间存在着边界和间隙. X射线Ф扫描实验结果表明, 晶柱之间的取向偏差在3°~30°之间. X射线ω摇摆曲线和谱线宽度分析结果表明, 薄膜中的晶柱是由多个晶粒堆叠而成, 且晶粒之间的平均取向偏差也在2.6°以上. 实验结果表明, ZnO大失配度异质外延膜是c轴［0001］取向柱状多晶体, ZnO薄膜的结晶不完整性主要是由其柱状晶结构造成的.

关键词: 氧化锌薄膜; 晶体取向; 取向柱状多晶体

Abstract:

ZnO(0002) films were grown on sapphire(0006) substrate by metal-organic chemical vapor deposition(MOCVD) and were characterized by X ray diffraction(XRD) and scanning electronic microscope(SEM). SEM and XRD results show that the columnar crystals grew along caxis and were vertical to the(0006) plane of the substrate. There exist grain boundaries and grain interstitials among the crystals. The Ф scanning curves of the(10-13) plane for ZnO films show that the misorientation among columnar crystals ranged from 3° to 30°. The full wide at half maximum(FWHM) of rocking curves of(0002) plane for the ZnO films is above 2.6°. Grain sizes at different thicknesses illustrate that the column is composed of the grains with different sizes. The big mismatch heteroepilayer ZnO films are columnar polycrystals orienting along c axis.

Key words: ZnO films; Crystal orientation; Columnar poly-crystals

中图分类号:

O484.5
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TrendMD:

侯长民,黄科科,高忠民,马艳,杜国同,李向山,冯守华 . 从晶体取向特点探讨ZnO薄膜的晶体不完整性. 高等学校化学学报, 2006, 27(5): 805.

HOU Chang-Min¹, HUANG Ke-Ke¹, GAO Zhong-Min¹, MA Yan², DU Guo-Tong², LI Xiang-Shan¹, FENG Shou-Hua ^1*. Studies on Crystal Structure of ZnO Films by the Mis-orientation. Chem. J. Chinese Universities, 2006, 27(5): 805.