高等学校化学学报

高等学校化学学报 ›› 2000, Vol. 21 ›› Issue (S1): 425.

• Chemistry in Surface Science • 上一篇    下一篇

Fabrication of Microhole Arrays with Confined Etchant Layer Technique

SUN Jian-Jun1, HUAN Hai-Gou1, CHEN Yi-An1, YAN Jia-Wei1, XIA Shan-Hong2, JIANG Li-Min1, TIAN Zhong-Qun1, TIAN Zhao-Wu1   

  1. 1. State Key Lab for Phys. Chem. of Solid Surf., Dept, of Chem. and Inst, of Phys. Chem., Xiamen Univ., Xiamen 361005;
    2. Inst, of Electronics, Chinese Academy of Science, State Key Lab of Transducer Technology, Beijing 100080
  • 出版日期:2000-12-31 发布日期:2000-12-31
  • 基金资助:

    The authors would thank the National Science Foundation of China (No. 29833070), and the National Key Fundamental Research and Development Project (No. G1999033107) and National Science foundation of Fujian Province (No. A0010003) for financial support.

Fabrication of Microhole Arrays with Confined Etchant Layer Technique

SUN Jian-Jun1, HUAN Hai-Gou1, CHEN Yi-An1, YAN Jia-Wei1, XIA Shan-Hong2, JIANG Li-Min1, TIAN Zhong-Qun1, TIAN Zhao-Wu1   

  1. 1. State Key Lab for Phys. Chem. of Solid Surf., Dept, of Chem. and Inst, of Phys. Chem., Xiamen Univ., Xiamen 361005;
    2. Inst, of Electronics, Chinese Academy of Science, State Key Lab of Transducer Technology, Beijing 100080
  • Online:2000-12-31 Published:2000-12-31
  • Supported by:

    The authors would thank the National Science Foundation of China (No. 29833070), and the National Key Fundamental Research and Development Project (No. G1999033107) and National Science foundation of Fujian Province (No. A0010003) for financial support.

PDF (PC)

摘要：

Drilling holes on materials is a very important technique in both traditional industry and modem science and technology. From fixing two huge workpieces, heat radiating of a turbofan and to fabricating a head of bubble jet printer, they all cannot do without it. Fabricating microhole arrays in micrometer scale or even down to nanometer range is a tough work and is usually performed by anisotropic etching of silicon, ion beam milling and laser ablation techniques, etc. However, they might be confronted the difficulties either in the limitation of the materials for machining or the time-consuming process.

Abstract:

Drilling holes on materials is a very important technique in both traditional industry and modem science and technology. From fixing two huge workpieces, heat radiating of a turbofan and to fabricating a head of bubble jet printer, they all cannot do without it. Fabricating microhole arrays in micrometer scale or even down to nanometer range is a tough work and is usually performed by anisotropic etching of silicon, ion beam milling and laser ablation techniques, etc. However, they might be confronted the difficulties either in the limitation of the materials for machining or the time-consuming process.

TrendMD: