Abstract:

The rules of the polymerization process of MIPK using AIBN as initiator in the C₆-C₁₂ hydrocarbons were studied. The results show that the rate of polymerization increases with the number of carbon atom in hydrocarbon, while M_η of the polymer is not significantly affected whatever hydrocarbon is used. The UV spectral sensitivity, thermal stability of the PMIPK and the sensitized PMIPK, as well as the IR spectra of PMIPK before photodegradation and after exposure to hydrogen lamp for 40 min and for 160 min, were closely observed. It has been shown that the monomer is produced during photodegradation in addition to the scission of main chain of the polymer. A series of the sensitized deep UV photoresists suitable for different wavelength were obtained. The sensitized PMIPK was coated on a Cr-coated glass plate, then exposed to deep UV through a soft contacting resolutional photomask. A lot of, very clean and fine lines of 0.4μ were obtained after developing and chemical etching, meeting requirements for microfabrication.