流化床CVD淀积过程中铝膜微结构及表面形貌的研究
刘书琴, 施大新, 崔怡红, 曹竹友
Microstructure and Surface Topography of Aluminum Films Deposited on Glass Microspheres in a Fluidized Bed CVD Reactor
LIU Shu-Qin, SHI Da-Xin, CUI Yi-Hong, CAO Zhu-You
高等学校化学学报 . 2000, (3): 339 -343 .