CJCU
Fabrication of Patterned Polymer Resists for Ion Etching by Using Dewetting
LU Guang, CAO Zhao-Liang, LU Zhen-Wu, LI Wei, YAO Ji-Min, ZHANG Gang, YANG Bai, SHEN Jia-Cong
Chem. J. Chinese Universities . 2002, (12): 2390 -2392 .