CJCU
Studies on the Relationship Between Substrate Temperature and Structure of CNx Thin Films Deposited by R.F. Magnetron Sputtering
CAO Pei-Jiang, JIANG Zhi-Gang, LI Jun-Jie, JIN Zeng-Sun, WANG Xin, ZHENG Wei-Tao, LI Zhe-Kui
Chem. J. Chinese Universities . 2002, (2): 275 -278 .