Abstract: Laser-induced gas-surface reaction of Ge(111)surface with chlorine is investigated by a CW supersonic molecular beam under a pulsed laser irradiation at 1064 nm.Amajor desorbed reaction product GeCl₂is determined at different surface temperatures by a timeresolved mass spectrometry.The reaction yield of GeCl₂increases obviously with increasing the translational energy of the incident chlorine molecules,laser fluence and surface temperature. But the translational temperature of GeCl₂measured by time-of-flight spectra are independent of incident Cl₂tanslational energy and laser fluence. Apossible reaction mechanism for the laser-induced reaction of Ge(111)with Cl₂at 1064 nm mainly consists of the dissociative chemisorption of Cl₂on the surface,the reaction of absorbed Cl with Ge atoms and the laser-induced thermal desorption.

Key words: Laser-induced reaction, Ge(111)surface, Molecular beam, Reaction kinetics