Abstract:

The esterify product of 2,3,4-trihydroxybenzophenone and 2,1-diazonaphthaquinone-5-sulfonyl chloride is widely used as the photoactive compound in photoresist. And its solubility is the critical factor in practical production. In this paper, several 2,3,4-trihydroxybenzophenone esterify 2,1-diazonaphthaquinone-5-sulfonyl chloride photoactive compounds were synthesized at different conditions and their solubility were different. High-pressure liquid chromatography was used to determine the retention time and integral area ratio of every esterified production. And through analyzing the stable configuration of photoactive compounds, the existence of triethylamine salt of diesterified product was thought to be the main factor that affects the solubility. Above all, the optimum synthetic condition of the photoactive compound is that acetone/water(85∶15, volume ratio) is applied as the solvent and Et3N is applied as the catalyst.

Key words: 2,3,4-Trihydroxybenzophenone; Diazonaphthaquinone photoactive compound; Solubility of photoactive compound