CJCU
Preparation of a Kind of Positive Chemically Amplified Deep UV Photoresist Material with High Sensitivity
WU Liping, HU Fanhua, WANG Qianqian, WANG Jing, WANG Liyuan
Chem. J. Chinese Universities . 2017, (5): 896 -901 .  DOI: 10.7503/cjcu20160804