具有辐射聚合能力的HfO<sub>2</sub>/SiO<sub>2</sub>溶胶-凝胶玻璃的制备及其X射线光刻性能研究

Preparation of HfO2/SiO2 Sol-gel with Radiation Polymerization Property Glass and Studies on Property of X-Ray Lithography

ZHAO Fu-Hua ^1,2; XIE Yong-Jun¹*; XU Su-Lian²; LIU Gang¹; FU Shao-Jun¹

Chem. J. Chinese Universities . 2006, (7): 1376 -1379 .