XPS Valence Band of ZnO Films

Abstract

Abstract: ZnO films are grown by the plasma-assisted metal organic chemical vapor deposition(MOCVD) on c-sapphire and are measured by XPS. The results show that comparing with O_1s and Zn_2p, Zn_3d has more obvious chemical displacement which can help us study the characteristics of ZnO film more effectively. The binding energy of Zn_3d electron becomes larger along with the strengthening of coupling between Zn_3d or Zn_3d+Zn_4s and O_2p. The temperature of DEZn is an important factor which affects the formation of covalent bond between Zn and O atoms.

Key words: ZnO films, XPS, Valence band spectrum

CLC Number:

TN304.055

TrendMD:

LI Wan-Cheng, DU Guo-Tong, YANG Xiao-Tian, LIU Bo-Yang, ZHANG Yuan-Tao, ZHAO Bai-Jun, JIANG Xiu-Ying . XPS Valence Band of ZnO Films[J]. Chem. J. Chinese Universities, 2004, 25(11): 2078.

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XPS Valence Band of ZnO Films

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