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Chem. J. Chinese Universities ›› 2006, Vol. 27 ›› Issue (5): 805.doi:

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Studies on Crystal Structure of ZnO Films by the Mis-orientation

HOU Chang-Min1, HUANG Ke-Ke1, GAO Zhong-Min1, MA Yan2, DU Guo-Tong2, LI Xiang-Shan1, FENG Shou-Hua 1*   

  1. 1. State Key Laboratory of Inorganic Synthesis and Preparative Chemistry, College of Chemistry;
    2. College of Electronic and Engineering, State Key Lab on Integrated Optoelectronics, Jilin University, Changchun 130012, China
  • Received:1900-01-01 Revised:1900-01-01 Online:2006-05-10 Published:2006-05-10
  • Contact: FENG Shou-Hua

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Abstract:

ZnO(0002) films were grown on sapphire(0006) substrate by metal-organic chemical vapor deposition(MOCVD) and were characterized by X ray diffraction(XRD) and scanning electronic microscope(SEM). SEM and XRD results show that the columnar crystals grew along caxis and were vertical to the(0006) plane of the substrate. There exist grain boundaries and grain interstitials among the crystals. The Ф scanning curves of the(10-13) plane for ZnO films show that the misorientation among columnar crystals ranged from 3° to 30°. The full wide at half maximum(FWHM) of rocking curves of(0002) plane for the ZnO films is above 2.6°. Grain sizes at different thicknesses illustrate that the column is composed of the grains with different sizes. The big mismatch heteroepilayer ZnO films are columnar polycrystals orienting along c axis.

Key words: ZnO films; Crystal orientation; Columnar poly-crystals

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